JPH0320432U - - Google Patents
Info
- Publication number
- JPH0320432U JPH0320432U JP7876589U JP7876589U JPH0320432U JP H0320432 U JPH0320432 U JP H0320432U JP 7876589 U JP7876589 U JP 7876589U JP 7876589 U JP7876589 U JP 7876589U JP H0320432 U JPH0320432 U JP H0320432U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- intake
- sucking
- exposure processing
- periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7876589U JPH0320432U (en]) | 1989-07-05 | 1989-07-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7876589U JPH0320432U (en]) | 1989-07-05 | 1989-07-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320432U true JPH0320432U (en]) | 1991-02-28 |
Family
ID=31622326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7876589U Pending JPH0320432U (en]) | 1989-07-05 | 1989-07-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320432U (en]) |
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1989
- 1989-07-05 JP JP7876589U patent/JPH0320432U/ja active Pending